Chamber wall heating for millisecond annealing systems

摘要

A system and method for reducing contamination of a reflector disposed on a chamber wall of a millisecond anneal system is provided. In one exemplary implementation, the reflector comprises (1) heating the fluid in a closed fluid system to control the temperature of the reflector; (2) electric cartridge heater (s) or heater ribbon (s) attached to the reflector; And / or (3) use of lamp light inside the chamber.