Pipe joint method, pipe joint component, pipe joint provided with the component, fluid controller, fluid control device, and semiconductor manufacturing device

摘要

The first tube member 4, the second tube member 6, is accommodated in the case 8, the second flange portion 18 of the second tube member 6, the first of the first tube member 4 The pressing member 10 for pressing toward the flange portion 16, the first opening 22, the second opening 24, the third opening 26, the flange receiving space 1 32 and the flange receiving space 1 ( A case 8 having a receiving space 2 28 for receiving the pressing member 10 in communication with 32 is prepared, and the first tube member 4 is first opened 22 from the second opening 24. ), The first flange portion 16 is held in the flange accommodation space 1 32, and the second pipe member 6 is inserted into the second opening 24 from the second flange portion 18. 2 A second plan by forming a state in which the flange portion 18 is brought into contact with the first flange portion 16, and inserting the pressing member 10 from the third opening 26 to accommodate the receiving space 2 (28). The first flange portion 16 and the second flange portion 18 by pressing the branch portion 18 toward the first flange portion 16 Method for joining pipe joints forming a sealing portion for sealing).