Pipe joint method, pipe joint component, pipe joint including the part, fluid controller, fluid control device, and semiconductor manufacturing apparatus

摘要

The first pipe member (4), the second pipe member (6), and the housing (8) are accommodated, and the second flange portion (18) of the second pipe member (6) is connected to the first pipe member (4). A pressing member (10) for pressing toward the first flange portion (16), a first opening (22), a second opening (24), a third opening (26), a flange housing space (1) (32), and the A housing (8) provided with housing spaces (2) and (28) for communicating with the flange housing spaces (1) and (32) and housing the pressing member (10) is prepared, and the first pipe member (4) Is inserted from the second opening (24) toward the first opening (22) to lock the first flange portion (16) in the flange housing space (1) (32) and the second pipe member (6). Is inserted into the second opening (24) from the second flange portion (18) to form a state in which the second flange portion (18) is in contact with the first flange portion (16), and the pressing member (10). Is inserted through the third opening (26) and is accommodated in the accommodating space (2) (28), thereby pressing the second flange portion (18) toward the first flange portion (16). A fitting method for a pipe joint for forming a seal portion for sealing the flange portion (16) and the second flange portion (18).