SUPPORTING UNIT OF SILICON SINGLE CRYSTAL INGOT AND GRINDING DEVICE OF SILICON SINGLE CRYSTAL INGOT INCLUDING THE SAME

摘要

The embodiment includes a body in which a holder supporting the edge of a silicon single crystal ingot is formed; An aperture disposed on the holder to adjust a cross-sectional area of the open area of the holder; And a sensor extending in the direction of the silicon single crystal ingot from the inner bottom surface of the holder.