Equipment Front End Module Retrofit Method For Nitrogen Supply

摘要

The present invention relates to a method for installing a circulation portion in an existing wafer transfer automation module structure to remove moisture inside a wafer transfer automation module while supplying nitrogen to the inside of the wafer transfer automation module. The wafer transfer automation module modification method for nitrogen supply comprises: a step (A) of manufacturing an air shutter unit comprising a fixed plate module, in which a plurality of first holes are formed at regular intervals, and a sliding plate module in which a plurality of second holes are formed at regular intervals to slide on the fixed plate module, the second hole overlaps the first hole when moving in a first direction, and the second hole closes the first hole when moving in a second direction; a step (B) of manufacturing a nitrogen supply unit including a housing module having the air shutter unit installed on one surface thereof and a receiving space formed therein, and a plurality of nozzle modules installed inside the housing module; and a step (C) of installing the nitrogen supply unit in an air circulation port of a fan filter unit (FFU) installed in the wafer transfer automation module (equipment front end module (EFEM)).