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POLISHING SLURRY ADDOTIVE COMPOSITION AND SLURRY COMPOSITION INCLUDING THE POLISHING SLURRY ADDOTIVE COMPOSITION

机译:抛光淤浆添加剂组合物和淤浆组合物,包括抛光淤浆添加剂组合物

摘要

The additive for abrasive slurries according to the present invention and the slurry composition comprising the same can reduce the amount of dishing when applied to polishing or planarization of an oxide film. More specifically, the additive for the polishing slurry includes a polyacrylic acid-based anti-freezing agent and a glycol-based complex forming agent, and the slurry composition forms a polishing liquid containing abrasive particles and a dispersing agent and a polyacrylic-acid-based anti-freezing agent and a glycol-based complex. By including the additive for the polishing slurry containing the agent, since the polyacrylic acid-glycol-based composite can reduce the dishing phenomenon, it is possible to improve the performance of the device in the ultrafine device.
机译:当将本发明的磨料浆料用添加剂和包含该添加剂的浆料组合物用于氧化膜的抛光或平坦化时,可以减少凹陷的量。更具体地,用于抛光浆料的添加剂包括聚丙烯酸类防冻剂和二醇类络合物形成剂,并且浆料组合物形成包含磨料颗粒和分散剂的抛光液以及聚丙烯酸类基剂。抗冻剂和乙二醇基复合物。通过在含有该试剂的研磨浆料中包含添加剂,由于聚丙烯酸-乙二醇类复合材料可以降低凹陷现象,因此可以提高超细装置中的装置性能。

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