SYSTEM AND METHOD FOR REJUVENATING AN IMAGING SENSOR DEGRADED BY EXPOSURE TO EXTREME ULTRAVIOLET OR DEEP ULTRAVIOLET LIGHT

摘要

The present invention for imaging sensor rehabilitation comprises a rehabilitation configured to selectively illuminate a portion of the imaging sensor of the imaging system with an illumination suitable for at least partially rehabilitating an imaging sensor deteriorated by exposure to at least one of EUV light or DUV light Lighting system; And a controller communicatively coupled to the rehabilitation illumination system and configured to instruct the rehabilitation illumination system to illuminate the imaging sensor for one or more illumination cycles during a non-imaging state of the imaging sensor.