首页> 外国专利> MASK INTEGRATED FRAME AND PRODUCING METHOD OF MASK INTEGRATED FRAME

MASK INTEGRATED FRAME AND PRODUCING METHOD OF MASK INTEGRATED FRAME

机译:面罩一体框及面罩一体框的制造方法

摘要

The present invention relates to a frame-integrated mask and a method of manufacturing the frame-integrated mask. The frame-integrated mask according to the present invention is a frame-integrated mask in which a plurality of masks 100 and a frame 200 supporting the mask 100 are integrally formed, and the frame 200 includes a hollow region R. It includes a frame frame part 210, a mask cell sheet part 220 having a plurality of mask cell regions CR and connected to the frame frame part 210, and each mask is manufactured by a rolling process. It is composed of a metal sheet (sheet), and each mask 100 is characterized in that it is connected to the upper portion of the mask cell sheet portion 200.
机译:框架集成掩模和制造框架集成掩模的方法技术领域本发明涉及框架集成掩模和制造框架集成掩模的方法。根据本发明的框架集成掩模是框架集成掩模,其中多个掩模100和支撑掩模100的框架200被一体形成,并且框架200包括中空区域R。它包括框架框架。在部分210中,掩模单元片部分220具有多个掩模单元区域CR并连接到框架框架部分210,并且每个掩模通过轧制工艺制造。它由金属片(片)组成,并且每个掩模100的特征在于,其连接到掩模单元片部分200的上部。

著录项

  • 公开/公告号KR102171352B1

    专利类型

  • 公开/公告日2020-10-28

    原文格式PDF

  • 申请/专利权人 주식회사 오럼머티리얼;

    申请/专利号KR20190067433

  • 发明设计人 이유진;

    申请日2019-06-07

  • 分类号H01L51/56;C23C14/04;C23C14/24;G03F7/16;G03F7/20;H01L51;

  • 国家 KR

  • 入库时间 2022-08-21 11:03:29

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