Laser direct writing and mask lithographic produced polymeric integrated optics

摘要

Integrated optics is an efficient tool for fast producing waveguides. We developed two different processes adopted for providing waveguides in polymeric integrated optics: (1) a direct UV-laser writing lithographic assembly and (2) a (direct contact) mask lithographic setup. Both are photochemical processes and use different stacked polymer layers (Ormocer?), which shall be structured. We compare the properties of both assemblies and reveal several advantages and disadvantages: the direct laser ray is more variable, but less precise; the mask production is faster and more reproducible, but there are only a few opportunities to change the manufactured structures. In fact, when there is no good base in form of proper coatings, the process to create waveguides is difficult to realise, no matter which system is used.