首页> 外国专利> MASK CELL SHEET FOR PRODUCING MASK INTEGRATED FRAME AND MASK INTEGRATED FRAME

MASK CELL SHEET FOR PRODUCING MASK INTEGRATED FRAME AND MASK INTEGRATED FRAME

机译:用于制造掩模集成框架和掩模集成框架的掩模芯板

摘要

The present invention relates to a mask cell sheet part for manufacturing a frame-integrated mask and a frame-integrated mask. The mask cell sheet part for manufacturing a frame-integrated mask according to the present invention is a mask cell sheet part used to manufacture a frame-integrated mask by attaching to an edge frame part, wherein the mask cell sheet part includes: an edge sheet part; at least one first grid sheet portion extending in a first direction and having both ends connected to the edge sheet portion; and at least one second grid sheet portion extending in a second direction perpendicular to the first direction, intersecting the first grid sheet portion, and having both ends connected to the edge sheet portion, wherein the mask cell sheet portion includes: It is characterized in that the plurality of mask cell regions are provided along at least one of the first direction and the second direction, and a dummy pattern is formed on at least a portion of the mask cell sheet portion to be spaced apart from the edge of the mask cell region by a predetermined distance.
机译:用于制造框架集成掩模和帧集成掩模的掩模单元片部和框架集成掩模技术领域用于制造根据本发明的框架集成掩模的掩模单元片部分是用于通过连接到边缘框架部分而制造框架集成掩模的掩模单元片部,其中掩模单元片部分包括:边缘片部分;至少一个沿第一方向延伸并且具有连接到边缘片部分的两端的至少一个第一栅格片部分;并且至少一个第二栅格片部分在垂直于第一方向的第二方向上延伸,与第一栅极片部分交叉,并且具有连接到边缘片部分的两端,其中掩模单元片部分包括:其特征在于多个掩模单元区域沿着第一方向和第二方向中的至少一个设置,并且在掩模单元片部分的至少一部分上形成虚设图案,以与掩模单元区域的边缘间隔开通过预定距离。

著录项

  • 公开/公告号KR20210154492A

    专利类型

  • 公开/公告日2021-12-21

    原文格式PDF

  • 申请/专利权人 주식회사 오럼머티리얼;

    申请/专利号KR1020200071556

  • 发明设计人 이병일;이유진;김영욱;

    申请日2020-06-12

  • 分类号H01L51/56;C23C14/04;H01L51;

  • 国家 KR

  • 入库时间 2022-08-24 22:56:29

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