首页>
外国专利>
MASK CELL SHEET FOR PRODUCING MASK INTEGRATED FRAME AND MASK INTEGRATED FRAME
MASK CELL SHEET FOR PRODUCING MASK INTEGRATED FRAME AND MASK INTEGRATED FRAME
展开▼
机译:用于制造掩模集成框架和掩模集成框架的掩模芯板
展开▼
页面导航
摘要
著录项
相似文献
摘要
The present invention relates to a mask cell sheet part for manufacturing a frame-integrated mask and a frame-integrated mask. The mask cell sheet part for manufacturing a frame-integrated mask according to the present invention is a mask cell sheet part used to manufacture a frame-integrated mask by attaching to an edge frame part, wherein the mask cell sheet part includes: an edge sheet part; at least one first grid sheet portion extending in a first direction and having both ends connected to the edge sheet portion; and at least one second grid sheet portion extending in a second direction perpendicular to the first direction, intersecting the first grid sheet portion, and having both ends connected to the edge sheet portion, wherein the mask cell sheet portion includes: It is characterized in that the plurality of mask cell regions are provided along at least one of the first direction and the second direction, and a dummy pattern is formed on at least a portion of the mask cell sheet portion to be spaced apart from the edge of the mask cell region by a predetermined distance.
展开▼