METHOD OF CONTROLLING THE STRUCTURAL STATE OF DIAMOND-LIKE THIN FILMS

摘要

FIELD: manufacturing technology.;SUBSTANCE: invention relates to production of thin diamond films. Method for controlling the structural state of diamond-like thin films involves scanning a surface of films with a probe of a scanning probe microscope in tunnel current mode, and geometric parameters of structural objects, which are sets of current channels, in which carbon atoms with sp²-bonds form a graphite phase, and non-conducting diamond fragments formed by carbon atoms with sp³-bonds, are determined by Fourier analysis.;EFFECT: invention can be used for operative control of structural state (distribution of sp²-and sp³-bonds).;1 cl, 4 dwg