MEMS sensor and method for manufacturing a MEMS sensor

摘要

The invention relates to a MEMS sensor element with a deflectably arranged membrane, comprising a substrate, a support structure for the deflectably arranged membrane, wherein the support structure is connected to the substrate at least in one area and wherein the membrane is partially connected to the support structure, and wherein a closed space is formed between the support structure and the membrane, and an electrode structure which is arranged in the closed space at a distance from the support structure and membrane.