MEMS sensor and method for manufacturing a MEMS sensor

摘要

MEMS sensor element (1b) with a deflectably arranged membrane (4), comprising a substrate (2), a support structure (9) for the deflectably arranged membrane (4), the support structure (9) with the substrate (2) at least in one Area (80) is connected and wherein the membrane (4) is partially connected to the support structure (9), and wherein a closed space (40) is formed between the support structure (9) and the membrane (4), and an electrode structure (6 ), which is arranged in the closed space (40) at a distance from the support structure (9) and membrane (4), the support structure (9) and substrate (2) being connected to one another via a spring structure (15).