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Apparatus and method for electron transfer from a sample to an energy analyzer and electron spectrometer apparatus

机译:电子从样品转移到能量分析仪和电子光谱仪的装置和方法

摘要

An electron imaging device 100, which is set up for electron transfer along an electron-optical axis OA from a sample 1 emitting electrons 2 to an energy analyzer device 200, comprises a first lens group 10 on the sample side, a second lens group 30 on the analyzer side and a deflection device 20, which is used to deflect the Electrons 2 is set up in an exit plane of the electron imaging device 100 in a deflection direction perpendicular to the electron-optical axis OA, the first lens group 10 having a first reciprocal plane RP1 within the first lens group 10 and a first Gaussian plane GP1 between the first and the second lens group 10, 30 and is set up to generate a first momentum distribution image of a momentum distribution of electrons 2 from sample 1 in the first reciprocal plane RP1 and to generate a first Gaussian image of sample 1 in the first Gaussian plane GP1, the second lens group 30 forms a second reciprocal plane RP2 on the analyzer side of the second lens group 30 and is set up to generate a second momentum distribution image of the momentum distribution of the electrons 2 from the sample 1 in the second reciprocal plane RP2, and the first lens group 10 to generate the first Gaussian image such a small size that the second pulse distribution image generated with the second lens group 30 is a parallel image. An electron spectrometer apparatus, an electron transfer method, and an electron spectrometry method are also described.
机译:设置用于沿电子光轴OA从发射电子2的样品1到能量分析仪200进行电子转移的电子成像设备100,包括位于样品侧的第一透镜组10,第二透镜组30在分析器侧,在电子成像装置100的出射面上,在垂直于电子光轴OA的偏转方向上设置有用于使电子2偏转的偏转装置20,第一透镜组10具有第一透镜组10内的第一往复平面RP1和第一透镜组10与第二透镜组30之间的第一高斯平面GP1设置为从样品1中产生电子2的动量分布的第一动量分布图像。第二透镜组30在第一往复平面RP1上并在第一高斯平面GP1上生成样本1的第一高斯图像,在第二透镜组30的检偏器侧形成第二往复平面RP2,并且第一透镜组10被设置为产生来自样品1的电子2的动量分布的第二动量分布图像,该样品2在第二倒向平面RP2中,并且第一透镜组10产生较小的第一高斯图像,使得第二脉冲分布图像由第二透镜组30产生的是平行图像。还描述了电子光谱仪设备,电子转移方法和电子光谱仪方法。

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