Micromechanical, capacitive evaluable component

摘要

A micromechanical, capacitively evaluable component (100), comprising: - a substrate (1); - first electrodes (11, 12) formed in a functional layer; - second electrodes (31, 32) formed in a further functional layer, which are at least partially above the first Electrodes (11, 12) are formed; and a seismic mass (W) which can be deflected in the z direction between the electrodes (11, 12, 31, 32) and can functionally cooperate with the electrodes (11, 12, 31, 32); wherein the first electrodes (11, 12) are largely exposed.