X-ray diffraction analysis method and X-ray diffraction analysis apparatus

摘要

An X-ray diffraction analysis method includes, placing a sample on a sample stage and acquiring a two-dimensional X-ray diffraction image from the sample using a two-dimensional detection circuit by irradiating the sample with an X-ray in a state where an X-ray irradiation angle is fixed, specifying a collection of diffraction spots having a predetermined range of diffraction angles from the X-ray diffraction image as a diffraction spot group, counting the number of diffraction spots having predetermined intensity or more in the diffraction spot group, grouping the diffraction spot group based on the number of diffraction spots, and identifying a crystal phase contained in the sample based on a diffraction angle of the grouped diffraction spot group.