PROBLEM TO BE SOLVED: To provide a high voltage power supply device capable of suppressing size enlargement of a whole device.SOLUTION: A high voltage power supply device comprises a plurality of power supply units 100 that are connected in series. The power supply unit 100 comprises: a voltage generation circuit; a housing 1 for storing the voltage generation circuit; and an electric field relaxation electrode 2 arranged to surround the housing 1. In the voltage generation circuit, a part of circuit elements constituting the voltage generation circuit is arranged outside the housing 1 and the electric field relaxation electrode 2 is constituted of an electrode member for relaxing concentration of an electric field and of the circuit element.SELECTED DRAWING: Figure 1
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