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Integrated optical switching using titanium nitride micro electromechanical systems

机译:使用氮化钛微机电系统的集成光学开关

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摘要

This thesis reports an integrated optical wavelength specific switching device for applications in optical integrated circuits (OICs) based on micro electromechanical systems (MEMS). The device consists of a ring resonator add-drop filter and a conductive MEMS bridge which is actuated by electrostatic force. Introducing conductive material into the electromagnetic evanescent field of the ring waveguide results in loss in the propagating light within, disabling the resonance and the filtering capabilities of the ring resonator. Therefore, by actuating the MEMS bridge in and out of the waveguide's evanescent field, the filter can be toggled between the on and off states. One large problem that must be faced when fabricating and actuating a MEMS cantilever or bridge structure for this type of device is the residual stress that may deflect the structure in an undesired way. This is because the vertical displacement of the structure is crucial. In order to solve this problem, this thesis is based on the use of titanium nitride (TiN) as structural material for the bridge. Titanium nitride has very attractive mechanical properties as well as good conductivity, which makes it an ideal structural material for electrostatically actuated devices.
机译:本论文报告了一种基于微机电系统(MEMS)的集成光波长特定开关器件,该器件可用于光集成电路(OIC)。该设备包括一个环形谐振器分插滤波器和一个由静电力驱动的导电MEMS桥。将导电材料引入到环形波导的电磁渐逝场中会导致内部传播光的损失,从而使环形谐振器的谐振和滤波功能失效。因此,通过将MEMS电桥驱动进出波导的渐逝场,或将其开出,滤波器可以在开和关状态之间切换。在制造和致动用于此类设备的MEMS悬臂或桥结构时,必须面对的一个大问题是可能以不希望的方式使结构变形的残余应力。这是因为结构的垂直位移至关重要。为了解决这个问题,本论文基于使用氮化钛(TiN)作为桥梁的结构材料。氮化钛具有非常吸引人的机械性能以及良好的导电性,这使其成为静电驱动设备的理想结构材料。

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