This thesis reports an integrated optical wavelength specific switching device for applications in optical integrated circuits (OICs) based on micro electromechanical systems (MEMS). The device consists of a ring resonator add-drop filter and a conductive MEMS bridge which is actuated by electrostatic force. Introducing conductive material into the electromagnetic evanescent field of the ring waveguide results in loss in the propagating light within, disabling the resonance and the filtering capabilities of the ring resonator. Therefore, by actuating the MEMS bridge in and out of the waveguide's evanescent field, the filter can be toggled between the on and off states. One large problem that must be faced when fabricating and actuating a MEMS cantilever or bridge structure for this type of device is the residual stress that may deflect the structure in an undesired way. This is because the vertical displacement of the structure is crucial. In order to solve this problem, this thesis is based on the use of titanium nitride (TiN) as structural material for the bridge. Titanium nitride has very attractive mechanical properties as well as good conductivity, which makes it an ideal structural material for electrostatically actuated devices.
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