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Carbon overgrowths and ion beam modification studies of FCC crystals by ion implantation

机译:通过离子注入对FCC晶体进行碳过度生长和离子束改性研究

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摘要

At the onset of this study, the work presented in Chapter 3 of this thesis was theudprimary focus. The work was motivated by JF Prins where he observed the formationudof diamond layers on copper followed by C+ implantation into copper. This initialudresult suggested that it may be possible to generate single crystal diamond layers onudsingle crystal copper. Subsequent efforts to reproduce this result failed. A uniqueudend station was developed where a number of parameters could be altered duringudthe implantation process. A series of carbon ion implantations were carried out onudcopper and copper-nickel (FCC) single crystals in this end station. The layers wereudcharacterised using initially Auger Electron Spectroscopy (AES), Low Energy ElectronudDiffraction (LEED) and later Raman Spectroscopy. During the early period of thisudstudy, the surface science equipment at the then Wits-Schonland Research Instituteudfor Nuclear Sciences, was constantly giving problems. The time constraints on waitingudfor funds to be made available to repair the equipment, urged me to pursue alternativeudresearch endeavours and the results of this research is presented in chapter 4 and 5.udThe initial work will be investigated further in the future. Details of the end stationudare presented and the initial results of carbon layers generated in this end station areudpresented.udIn chapter 4, a study of C+ implantation into a type IIa (FCC single crystal) diamondudusing the cold implantation rapid annealing (CIRA) technique is reported. The Ramanudspectrum was recorded as a function of annealing temperature and C+ ion dose. De-udfect peaks at 1450, 1498 and 1638 cm−1 appear in the Raman spectra, which have beenudpreviously considered to be unique to MeV implantation. The maximum energy ofudimplantation used in this study was 170 keV. The peaks were monitored as a functionudof annealing temperature and ion dose. The annealing behaviour of the peaks wereudsimilar to those observed in the MeV implantation experiments. It is thus concludedudthat the defects that give rise to these peaks are related to the point-defect interac-udtions that occur within the implantation regime and not to the implantation energy.ud1udUnderstanding the nature of the defects that arise during the implantation annealingudprocess, allows one to manipulate the implantation-annealing cycle, so as to generateuddefect structures that are useful in the fabrication of an active device in a diamondudsubstrate. This is shown in chapter 5.udA p-type (type IIb, FCC crystal) diamond was implanted with either carbon or phos-udphorus ions using the cold implantation rapid annealing (CIRA) process. In each case,udthe energies and doses were chosen such that upon annealing, the implanted layerudwould act as an n-type electrode. The electroluminescence (EL) emitted from theseudcarbon and phosphorus junctions, when biased in the forward direction, was comparedudas functions of annealing and diode temperatures. Typical luminescence bands such asudthose observed in cathodoluminescence (CL), in particular blue band A (2.90 eV) andudgreen band (2.40 eV) were observed. Two bands centred around 2.06 and 4.0 eV wereudalso observed for both the carbon and phosphorus junctions, while a band at 4.45 eVudappeared only in the phosphorus implanted junction. This was the first time that theud4.45 eV band was observed in an electroluminescent junction.
机译:在本研究开始时,本文的第3章介绍的工作是 u>首要的重点。这项工作是由JF Prins推动的,他观察到铜上形成金刚石层,然后C +注入铜中。最初的建议表明,可能在单晶铜上生成单晶金刚石层。随后为重现此结果所做的努力失败了。开发了一个独特的工作台,可以在植入过程中更改许多参数。在此终端站中,对铜铜和铜镍(FCC)单晶进行了一系列碳离子注入。最初使用俄歇电子能谱(AES),低能电子 udDiffraction(LEED)和后来的拉曼光谱对层进行了表征。在这项研究的早期,当时的Wits-Schonland研究所 udfor核科学研究所的表面科学设备经常出现问题。在等待 udf资金来维修设备方面存在时间限制,敦促我进行另类 udre研究工作,该研究的结果在第4章和第5章中介绍。 ud初期的工作将在以后进行进一步的研究。 。 ud展示了终端站的详细信息/胆量以及在该终端站中产生的碳层的初始结果。 ud在第4章中,对C +注入IIa型(FCC单晶)金刚石的研究通过冷注入快速进行了研究报道了退火(CIRA)技术。记录拉曼光谱是退火温度和C +离子剂量的函数。拉曼光谱中出现了在1450、1498和1638 cm-1处的缺陷峰,这以前被认为是MeV注入所独有的。本研究中使用的植入的最大能量为170 keV。监测峰作为退火温度和离子剂量的函数。峰的退火行为与在MeV注入实验中观察到的退火行为不相似。因此得出结论, ud1 ud了解产生这些峰的缺陷与在注入方案内发生的点缺陷相互作用有关,与注入能量无关。植入退火/ ud过程允许人们操纵植入-退火循环,从而产生缺陷结构,该缺陷结构可用于在金刚石 ud衬底中制造有源器件。在第5章中对此进行了说明。 udA通过使用冷注入快速退火(CIRA)工艺向p型(IIb型,FCC晶体)钻石中注入了碳或磷离子。在每种情况下,选择能量和剂量,使得在退火时,注入的层将充当n型电极。当朝正向偏置时,比较了这些 ud碳和磷结的发射电致发光(EL),以比较退火和二极管温度的作用。观察到典型的发光带,例如在阴极发光(CL)中观察到的 uthose,特别是蓝色带A(2.90 eV)和 udgreen谱带(2.40 eV)。在碳和磷连接处也观察到两个以2.06和4.0 eV为中心的谱带,而仅在注入磷的连接处出现在4.45 eV的谱带。这是第一次在电致发光结中观察到 ud4.45 eV带。

著录项

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    Naidoo Shunmugam Ramsamy;

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  • 年度 2008
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  • 原文格式 PDF
  • 正文语种 en
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