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Full-field Fourier ptychography (FFP): Spatially varying pupil modeling and its application for rapid field-dependent aberration metrology

机译:全场傅立叶PTYCHOGACT(FFP):空间不同的瞳孔建模及其快速现场依赖性差距计量的应用

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摘要

Digital aberration measurement and removal play a prominent role in computational imaging platforms aimed at achieving simple and compact optical arrangements. A recent important class of such platforms is Fourier ptychography (FP), which is geared toward efficiently creating gigapixel images with high resolution and large field of view (FOV). In current FP implementations, pupil aberration is often recovered at each small segment of the entire FOV. This reconstruction strategy fails to consider the field-dependent nature of the optical pupil. Given the power series expansion of the wavefront aberration, the spatially varying pupil can be fully characterized by tens of coefficients over the entire FOV. With this observation, we report a Full-field Fourier Ptychography (FFP) scheme for rapid and robust aberration metrology. The meaning of “full-field” in FFP is referred to the recovery of the “full-field” coefficients that govern the field-dependent pupil over the entire FOV. The optimization degrees of freedom are at least two orders of magnitude lower than the previous implementations. We show that the image acquisition process of FFP can be completed in ∼1 s and the spatially varying aberration of the entire FOV can be recovered in ∼35 s using a central processing unit. The reported approach may facilitate the further development of FP. Since no moving part or calibration target is needed in this approach, it may find important applications in aberration metrology. The derivation of the full-field coefficients and its extension for Zernike modes also provide a general tool for analyzing spatially varying aberrations in computational imaging systems.
机译:数字像差测量和删除在旨在实现简单和紧凑的光学布置的计算成像平台中起着突出的作用。最近的一个这样的平台是傅立叶PTychography(FP),其朝向有效地创建具有高分辨率和大视野(FOV)的高曲奇素图像。在当前的FP实现中,瞳孔像差通常在整个FOV的每个小段处恢复。这种重建策略未能考虑光学瞳孔的现场依赖性。鉴于波前像差的功率串联扩展,空间变化的瞳孔可以完全表征在整个FOV上的数十系数。通过这种观察,我们报告了一种用于快速和鲁棒的像差计量的全场傅立叶PTYChography(FFP)方案。 “全场”在FFP中的含义被称为“全场”系数的恢复,该系数在整个FOV上管理现场依赖的学生。优化自由度比以前的实现低至少两个数量级。我们表明FFP的图像采集过程可以在〜1 S中完成,并且可以使用中央处理单元在〜35秒内恢复整个FOV的空间变化的像差。报告的方法可以促进FP的进一步发展。由于这种方法中不需要移动部分或校准目标,因此它可能在像差计量中找到重要的应用。全场系数的推导及其对Zernike模式的扩展还提供了一种用于分析计算成像系统中的空间变化的像差的一般工具。

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