Error compensation technology offers a significant means for improving the geometric accuracy of CNC machine tools (MTs) as well as extending their service life. Measurement and identification are important prerequisites for error compensation. In this study, a measurement system, mainly composed of a self-developed micro-angle sensor and an L-shape standard piece, is proposed. Meanwhile, a stepwise identification method, based on an integrated error model, is established. In one measurement, four degrees-of-freedom errors, including two-dimensional displacement and two-dimensional angle of a linear guideway, can be obtained. Furthermore, in accordance with the stepwise identification method, the L-shape standard piece is placed in three different planes, so that the measurement and identification of all 21 geometric errors can be implemented. An experiment is carried out on a coordinate measuring machine (CMM) to verify the system. The residual error of the angle error, translation error and squareness error are 1.5″, 2 μm and 3.37″, respectively, and these are compared to the values detected by a Renishaw laser interferometer.
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