The microscale structures prepared on copper foil by laser shock deformation was introduced in the paper. The various sizes of hexagonal structures were successfully fabricated on copper foil with different molds. The influence of laser energy on the deformation depth of a hexagonal structure was studied using experiments. The morphology of the hexagonal structures on copper foil was observed by a three-dimensional profilometer, and mechanical property were characterized by a nanoindenter. A finite element model was established in order to describe the copper foil forming mechanism on mold and calculate the residual stress distribution. The microstructures and cross-section deformation of copper foil on different molds were also observed. The results indicated that the depth of hexagonal structures on 50# mold was higher than that of the structures on 100# mold and 230# mold, and the depth of hexagonal structures increased with the increasing of pulse laser energy. The copper foil above the mold hexagon side was bent and thinned after laser shock, and the grains of copper foil were also refining. The mechanical properties of copper foil were improved after laser shock was performed on the mold.
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