Solid state AC electroosmosis micro pump on a chip

摘要

Lab-On-a-Chip (LOC) or Micro Total AnalysisSystem (µTAS) technology requires precise control of minute amounts of liquid. Moving liquids in small capillaries requires bulky expensive external pumps that defy the purpose of microfabrication. By integrating a micropump into the device, itallows the system to be transportable, reliable, energy efficient and inexpensive. This system encompasses a solid-state AC electroosmotic pump for the manipulation of liquid containingcells or molecules. This paper reports extensively on the investigation of the pumping ability of the solid state array with KCl solution. Fluorescent beads of 500 nm where used as tracerto monitor the fluid velocity. Two different array geometries were investigated as well as different material for the electrodes.Dielectorphoretic trapping of nanoparticles and cells was achieved. This paper will discuss the inherent problem of an AC electroosmosis driven micropump for lab on chip applications as well as the fluid flow yield in both directions and magnitude incorrelation with electric field intensity and frequency.