Sensitivity of Hot-Cathode Ionization Vacuum Gages in Several Gases

摘要

Four hot-cathode ionization vacuum gages were calibrated in 12 gases. The relative sensitivities of these gages were compared to several gas properties. Ionization cross section was the physical property which correlated best with gage sensitivity. The effects of gage accelerating voltage and ionization-cross-section energy level were analyzed. Recommendations for predicting gage sensitivity according to gage type were made. (Author)