PROCESS FOR PRODUCING TRIS S(N-METHYLAMINO) METHYLSILANE

摘要

A method of producing tris (N-methylamine) methylsilane, including the steps of forming and cooling a liquid solution of methylamine in an inert solvent and under an inert atmosphere at a temperature of about -30" C. and slowly adding a quantity of methyltrichlorosilane while maintaining said temperature. The reaction mixture is then heated for about 60 minutes at a temperature of about 40" C., followed by filtering the solid portion from the liquid portion. The liquid is distilled to remove the solvent, resulting in a high yield of tris (N-methylamine) methylsilane.