Mechanical Protection of DLC (Diamond Like Carbon) Films on Fused Silica Slides

摘要

Measurements were made with a new test for improved quantitative estimation of the mechanical protection of thin films on optical materials. The mechanical damage was induced by a sand blasting system using spherical glass beads. Development of the surface damage was measured by the changes in the specular transmission and reflection, and by inspection using a surface profilometer and a scanning electron microscope. The changes in the transmittance versus the duration of sand blasting was measured for uncoated fused silica slides and coated ones. It was determined that the diamond like carbon films double the useful optical lifetime of the fused silica. Theoretical expressions were developed to describe the stages in surface deterioration. Conclusions were obtained for the SiO2 surface mechanism and for the film removal mechanism.