The divergence characteristics of constrained-sheath optics systems for use with 5-eV atomic oxygen sources

摘要

The potential usefulness of the constrained sheath optics concept as a means of controlling the divergence of low energy, high current density ion beams is examined numerically and experimentally. Numerical results demonstrate that some control of the divergence of typical ion beamlets can be achieved at perveance levels of interest by contouring the surface of the constrained sheath properly. Experimental results demonstrate that a sheath can be constrained by a wire mesh attached to the screen plate of the ion optics system. The numerically predicted beamlet divergence characteristics are shown to depart from those measured experimentally, and additional numerical analysis is used to demonstrate that this departure is probably due to distortions of the sheath caused by the fact that it attempts to conform to the individual wires that make up the sheath constraining mesh. The concept is considered potentially useful in controlling the divergence of ion beamlets in applications where low divergence, low energy, high current density beamlets are being sought, but more work is required to demonstrate this for net beam ion energies as low as 5 eV.