The Properties of CrN/Au and Cr/CrN/Au Multilayers

机译：CrN / au和Cr / CrN / au多层膜的性质

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Gold has been used as a conductor material in many microelectronic applications because of its low resistivity, bondability, and oxidation/corrosion resistance.

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Kolawa, E.; Lie, D.; Reid, J.; Tai, B.; Lowry, L.; Scott-Monck, J.;
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年度 1994
页码 1-1
总页数 1
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
ADHESION; CONDUCTORS; CORROSION RESISTANCE; DIFFUSION; ELECTRICAL RESISTIVITY; GOLD; MICROELECTRONICS; OXIDATION RESISTANCE; adhesion of gold diffusion barrier performance of reactively mechanical stress; of individual films peel tests;

机译：附着力;导体，耐腐蚀性能;扩散;电阻率;金;微电子;抗氧化性;金扩散阻挡层附着力反应机械应力;个别薄膜剥离试验;

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1. 电弧离子镀Cr/CrN多层膜的微结构与压痕韧性 [J] . 宋贵宏, 娄茁, 李锋, 中国有色金属学报（英文版） . 2015,第003期
2. 电弧离子镀Cr/CrN多层膜的微结构与压痕韧性（英文） [J] . 宋贵宏, 娄茁, 李锋, 中国有色金属学报：英文版 . 2015,第003期
3. Comparative evaluation of TiN/CrN, AIN/CrN, TiAIN/CrN multilayer films for the use of semi-solid processing of Cu alloys [J] . SangYong Lee, SangYul Lee Diffusion and Defect Data. Solid State Data, Part B. Solid State Phenomena . 2006,第0期

机译：用于铜合金半固态加工的TiN / CrN，AlN / CrN，TiAIN / CrN多层膜的比较评估
4. Raman spectroscopy studies on the thermal stability of TiN, CrN, TiAlN coatings and nanolayered TiN/CrN, TiAlN/CrN multilayer coatings [J] . Harish C. Barshilia, K.S. Rajam Journal of Materials Research . 2004,第11期

机译：拉曼光谱研究TiN，CrN，TiAlN涂层和纳米TiN / CrN，TiAlN / CrN多层涂层的热稳定性
5. Antibacterial Effect of Au Implantation in Ductile Nanocomposite Multilayer (TiAlSiY)N/CrN Coatings [J] . Pogrebnjak Alexander D., Kong Chun-Hua, Webster Richard F., ACS applied materials & interfaces . 2019,第51期

机译：韧性纳米复合材料多层（TiAlsiy）N / CRN涂层抗菌作用
6. Study of corrosion properties of CrN and multilayer CrN/Cr coating at different electrolyte temperatures deposited on stainless steel by vacuum arc process [C] . Rajesh Mundotia, Nirmala J. Thorat, Ashwin Kale, DAE Solid State Physics Symposium . 2019

机译：真空电弧工艺在不锈钢上沉积在不同电解质温度下CRN和多层CRN / Cr涂层的腐蚀性能研究
7. Processing-structure-property relationship in sputter-deposited Cr/CrN coatings. [D] . Pakala, Mahendra. 1998

机译：溅射沉积Cr / CrN涂层的加工结构与性能的关系。
8. RBS Depth Profiling Analysis of (Ti Al)N/MoN and CrN/MoN Multilayers [O] . Bin Han, Zesong Wang, Neena Devi, 2017

机译：（TiAl）N / MoN和CrN / MoN多层的RBS深度轮廓分析
9. Propiedades eléctricas de nano-multicapas de Cr/CrN producidas por la técnica de sputtering con magnétrón desbalanceado / Electrical properties of Cr/CrN nano-multilayers produced by the unbalanced magnetron sputtering technique [O] . Marulanda Cardona Diana Maritza, Olaya Flórez Jhon Jairo 2011

机译：采用非平衡磁控溅射技术制备Cr / CrN纳米多层膜的非均衡磁/电性能溅射技术制备Cr-CrN纳米多层膜的电学性能

The Properties of CrN/Au and Cr/CrN/Au Multilayers

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