Precision Thickness Variation Mapping via One-Transducer Ultrasonic High Resolution Profilometry for Sample with Irregular or Rough Surface

摘要

An apparatus and method for determination of sample thickness and surface depression utilizing ultrasonic pulses. The sample is held in a predetermined position by a support member having a reference surface. Ultrasonic pulses travel through a medium of known velocity propagation and reflect off the reference surface and a sample surface. Time of flight data of surface echoes are converted to distances between sample surfaces to obtain computer-generated thickness profiles and surface mappings.