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Unreleased polysilicon beam failure. MEMS Reliability Alliance Technical Report 37-01

机译：未发布的多晶硅光束故障。 mEms可靠性联盟技术报告37-01

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Lawton, R.; Lin, G.; Wellman, J.;
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年度 2000
页码 1-5
总页数 5
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
FAILURE; MICROELECTROMECHANICAL SYSTEMS; RELIABILITY; RELIABILITY ANALYSIS; SILICON POLYMERS; MEMS reliability analysis;

机译：失败;微电子机械系统;可靠性;可靠性分析;硅聚合物; mEms可靠性分析;

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1. Reliability assessment of polysilicon MEMS structures under mechanical fatigue loading [J] . Soboyejo ABO., Bhalerao KD., Soboyejo WO. Journal of Materials Science . 2003,第20期

机译：机械疲劳载荷下多晶硅MEMS结构的可靠性评估
2. Reliability assessment of polysilicon MEMS structures under mechanical fatigue loading [J] . A. B. O. Soboyejo, K. D. Bhalerao, W. O. Soboyejo Journal of Materials Science . 2003,第20期

机译：机械疲劳载荷下多晶硅MEMS结构的可靠性评估
3. Fabrication of electron beam physical vapor deposited polysilicon piezoresistive MEMS pressure sensor [J] . Singh Kulwant, Joyce Robin, Varghese Soney, Sensors and Actuators, A. Physical . 2015,第Null期

机译：电子束物理气相沉积多晶硅压阻MEMS压力传感器的制作
4. Tutorized writing of technical reports as a learning tool for electronic equipment on EMC, Reliability And Safety [C] . 4th IEEE International Conference on E-Learning in Industrial Electronics . 2010

机译：作为技术的指导性报告撰写技术报告，作为电子设备在EMC，可靠性和安全性方面的学习工具
5. It is easy to see but it is better to foresee: a case report on the favourable alliance between CardioMEMS and levosimendan [O] . Valeria Visco, Cristina Esposito, Paolo Vitillo, 2020

机译：很容易看但更好的是预见：关于Cardiomems和Levosimendan之间有利联盟的案例报告
6. Automated array assembly task. Development of low-cost polysilicon solar cells. Quarterly technical report No. 1 [O] . K.L. Allison, S.S. Rhee, G.T. Jones 1979

机译：自动阵列装配任务。低成本多晶硅太阳能电池的开发。季度技术报告1
7. Reliability Testing of Polysilicon For MEMs Devices [R] . LaVan, D. A., Buchheit, T. E. 1999

机译：用于mEms器件的多晶硅可靠性测试

Unreleased polysilicon beam failure. MEMS Reliability Alliance Technical Report 37-01

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