Laser-induced damage of fused silica at 355 and 1065 nm initiated at aluminum contamination particles on the surface

摘要

1-(mu)m thick circular dots, 10-250 (mu)m dia, were deposited onto 1.14 cm thick fused silica windows by sputtering Al through a mask. Al shavings were also deposited on the windows to investigate effects of particle-substrate adhesion. The silica windows were then illuminated repetitively using a 3-ns, 355 nm and an 8.6-ns, 1064 nm laser. The tests were conducted at near normal incidence with particles on input and output surfaces of the windows. During the first shot, a plasma ignited at the metal particle and damage initiated on the fused silica surface. The morphology of the damage at the metal dots were reproducible but different for input and output surface contamination. For input surface contamination, minor damage occurred where the particle was located; such damage ceased to grow with the removal of contaminant material. More serious damage (pits and cracks) was initiated on the output surface (especially at 355 nm) and grew to catastrophic proportions after few shots. Output surface contaminants were usually ejected on the initial shot, leaving a wave pattern on the surface. No further damage occurred with subsequent shots unless a shot (usually the first shot) cracked the surface; such behavior was mostly observed at 355 nm and occasionally for large shavings at 1064 nm. The size of the damaged area scaled with the size of the particle (except when catastrophic damage occurred). Onset of catastrophic damage on output surface occurred only when particles exceeded a critical size. Damage behavior of the sputtered dots was found to be qualitatively similar to that of the shavings. The artificial contamination technique accelerated the study by allowing better control of the test conditions.