Modular overconstrained weak-link mechanism for ultraprecision motion control

摘要

We have designed and constructed a novel miniature overconstrained weak-linkmechanism that will allow positioning of two crystals with better than 50n rad angular resolution and nanometer linear driving sensitivity. The precision and stability of this structure allow the user to align or adjust an assembly of crystals to achieve the same performance as does a single channel-cut crystal, so we call it an 'artificial channel-cut crystal.' Unlike the traditional kinematic linear spring mechanisms, the overconstrained weak-link mechanism provides much higher structure stiffness and stability. Using a laminar structure configured and manufactured by chemical etching and lithography techniques, we are able to design and build a planar-shape, high stiffness, high precision weak-link mechanism. In this paper, we present recent developments for the overconstrained weak-link mechanism. Applications of this new technique to synchrotron radiation instrumentation are also discussed.