Applications of Laminar Weak-Link Mechanisms for Ultraprecision Synchrotron Radiation Instruments

摘要

Unlike traditional kinematic flexure mechanisms, laminar overconstrained weak-link mechanisms provide much higher structure stiffness and stability. Using a laminar structure configured and manufactured by chemical etching and lithography techniques, we are able to design and build linear and rotary weak-link mechanisms with ultrahigh positioning sensitivity and stability for synchrotron radiation applications. Applications of laminar rotary weak-link mechanism include: high-energy-resolution monochromators for inelastic x-ray scattering and x-ray analyzers for ultra-small-angle scattering and powder-diffraction experiments. Applications of laminar linear weak-link mechanism include high-stiffness piezo-driven stages with subnanometer resolution for an x-ray microscope. In this paper, we summarize the recent designs and applications of the laminar weak-link mechanisms at the Advanced Photon Source.