Future metrology needs for synchrotron radiation grazing-incidence optics

摘要

An International Workshop on Metrology for X-ray and Neutron Optics, the first ofits kind, was held March 16-17, 2000, at the Advanced Photon Source at Argonne National Laboratory. Metrology specialists, beamline engineers and scientists, and vendors from around the world met to evaluate current metrology instrumentation and methods used to characterize the surface figure and finish of long grazing-incidence optics used in synchrotron radiation beamlines, and to consider future needs for synchrotron, FEL, and neutron sources. This paper summarizes the discussions on mirror and metrology requirements for the current and next-generation x-ray sources. Some recommended strategies for the needs of the future are also given.