Synchrotron radiation measuring instrument and synchrotron radiation measuring method

摘要

There is provided a synchrotron radiation meter comprising a specimen region, an irradiation unit for irradiating a sample positionable in the specimen region, and a detection unit with a beam detector for detecting a beam emitted from the specimen. In this case the illumination unit comprises a beam source, a first spectroscopic element arranged in the direction of the beam after the beam source for resolving the beam into its spectral components, a second spectroscopic element arranged behind the first spectroscopic element for selecting spectral components And a second spectroscopic element arranged in the beam direction after the first micromirror array and for combining the selected spectral components into one common excitation beam. In addition, there is provided a method for measuring synchrotron radiation by a synchrotron radiation meter which selects the spectral composition of the excitation beam by reflection and / or non-reflection of individual micromirrors of the first micromirror array.BACKGROUND OF THE INVENTION