Synchrotron radiation measuring apparatus and method

摘要

PROBLEM TO BE SOLVED: To shorten the measuring time, and to prolong the life of a device by providing a measuring means for directly receiving the beam from a light source with plural light receiving means and a computing means for computing the predetermined parameter of a beam intensity profile on the basis of the information of plural beam intensity obtained by the measuring means. ;SOLUTION: Two photodiodes 7 and one photodiode 8 are provided in the downstream of a filter 16 at positions corresponding to two pin holes 2 and one vertical slit 4 provided in an aperture plate 5 so as to directly receive the beam outgoing from the synchrotron radiation light. Plural beam intensity obtained by receiving the light is substituted in calibration function previously accumulated and decided, and thickness of the beam and position Y are thereby computed. These computing can be performed in a short time by converting the output of the photodiodes 7, 8 to numerical values while using an analog/ digital converter, and processing while using a computer, and fluctuation in a short time can be accurately performed.;COPYRIGHT: (C)2001,JPO