Applications of Ellipsometry to Solar Cell Research

摘要

Ellipsometry can be utilized for both optical and structural characterization of materials. Possible applications of ellipsometry to solar cell development include determination of thickness and optical constants of: (1) thin insulator films formed on semiconductor substrates, such as used in MIS cells; (2) semiconductor films or substrates; (3) metal films; and (4) antireflection (AR) coatings. These applications are discussed; the basic equations of ellipsometry are presented; and commercial ellipsometers are described. (ERA citation 05:030384)