Thermal-Desorption Measurements for Estimating Bakeout Characteristics of Vacuum Devices

摘要

This paper will be confined to outgassing phenomena and will not discuss gettering (sinks) or permeation (transfer through the entire vacuum wall) further, although their importance in long term prediction cannot be ignored. Measuring outgassing rates directly is complicated by the dynamic interaction between the samples being measured and the apparatus in which the measurements are made. Thermodesorption data are presented for molybdenum, nickel, Fe-Ni-Co alloy, copper, Cu-Be alloy, molybdenum sealing glass ceramic, and high-alumina ceramic. (ERA citation 07:005326)