Automated C-V and Parallel Y Parallel- omega Curves for MOS Device Analysis

摘要

Two automated systems have been developed to acquire 1 MHz and quasi-static capacitance-voltage curves simultaneously, and parallel Y parallel- omega curves rapidly. Several major innovations have been made over more conventional measurement systems and techniques. The instrumental setups are described, and the equations used to reduce the data are outlined. Examples of typical data acquired on each system are presented. (ERA citation 07:054781)