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Materials Surface Modification by Plasma Bombardment under Simultaneous Erosion and Redeposition Conditions

机译:在同时侵蚀和再沉积条件下通过等离子轰击进行材料表面改性

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The first in-depth investigation of surface modification of materials by continuous, high-flux argon plasma bombardment under simultaneous erosion and redeposition conditions have been carried out for copper and 304 stainless steel using the PISCES facility. The plasma bombardment conditions are: incident ion flux range from 10 sup 17 to 10 sup 19 ions sec sup -1 cm sup -2 , total ion fluence is controlled between 10 sup 19 and 10 sup 22 ions cm sup -2 , electron temperature range from 5 to 15 eV, and plasma density range from 10 sup 11 to 10 sup 13 cm sup -3 . The incident ion energy is 100 eV. The sample temperature is between 300 and 700K. Under redeposition dominated conditions, the material erosion rate due to the plasma bombardment is significantly smaller (by a factor up to 10) than that can be expected from the classical ion beam sputtering yield data. It is found that surface morphologies of redeposited materials strongly depend on the plasma bombardment condition. The effect of impurities on surface morphology is elucidated in detail. First-order modelings are implemented to interpret the reduced erosion rate and the surface evolution. Also, fusion related surface properties of redeposited materials such as hydrogen reemission and plasma driven permeation have been characterized. (ERA citation 11:052879)

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