Design and Fabrication of Binary-Valued Alignment Reticle Patterns

摘要

We have studied techniques for alignment reticle fabrication. Two design methods are discussed in this report: one uses an iterative procedure and the other uses results from number theory. A third method was also studied briefly; this being a binary chirp grating. Although this was described in a previous report, we did not find it particularly promising and do not discuss it in this document. It is our opinion that either of the two methods discussed in this report can be made into a workable system if there is sufficient interest. It is also our opinion that the reticle design based on number theory, which uses the polarization encoding of two patterns onto a single substrate, is a powerful method which deserves further consideration. (ERA citation 13:022270)