UV Laser Ablation of Parylene Films from Gold Substrates.

摘要

Parylene films, coating gold substrates, were removed by laser ablation using 248 nm light from an excimer laser. Each sample was processed by a different number of pulses in one of three different environments: air at atmospheric pressure, nitrogen at atmospheric pressure, and vacuum. The laser-induced craters were analyzed by optical microscopy and x-ray photoelectron spectroscopy. Multi-pulse ablation thresholds of gold and parylene were estimated.