Laser Ablation of Nitrogen-Solid Films by UV ps-Laser Irradiation: Surface Modification of Materials by Fragments in Laser-Ablation Plume

摘要

Laser ablation of nitrogen solid film deposited on a copper plate at 10 K was investigated by the irradiation of a picosecond UV laser at 263 nm in vacuum. Photo-dissociation of nitrogen molecule hi the solid film was confirmed by the optical emissions, which were ascribed to atomic nitrogen, during the laser irradiation at the fluence of 5 J·cm~(-2)·pulse~(-1). This photolysis was discussed by the comparison with laser-induced breakdown of nitrogen gas. At the fluence over ca. 10 J·cm~(-2)·pulse~(-1), the ablation of the frozen nitrogen film was observed. Employing the ablation plume including a reactive species such as nitrogen atoms, the surface reaction of a graphite (highly oriented pyrolytic graphite (HOPG)) plate and silicon wafer was studied. XPS analysis indicated that nitrides were formed on the surfaces by the treatment. The ps-laser ablation of nitrogen solid film provides a novel technique for surface modification of materials.