Texture development in diamond films grown by hot filament CVD processes.

摘要

Diamond films with (l angle)110(r angle) and (l angle)100(r angle) textures were analyzed by x-ray diffraction, transmission electron microscopy and scanning electron microscopic examinations of the evolving growth surface topography. Results support the hypothesis that twinning can play an important role in the nucleation and growth of the (l angle)110(r angle) texture. A model similar to that proposed to explain the development of the (l angle)110(r angle) texture in silicon film growth can also explain the development of the (l angle)110(r angle) textures in diamond films. A special ''near (l angle)100(r angle)'' textured film with (l brace)100(r brace) facets perpendicular to the growth direction is described. This material is free of intra-crystalline stacking faults and twins. Growth mechanisms and texture development are discussed, and it is shown that randomly oriented nuclei grow into films with crystallites oriented so that the ''fastest growing'' crystallographic direction is normal to the substrate. 11 refs., 5 figs.