Measurements and analysis of the equivalent circuit of the GEC RF Reference Cell.

摘要

The equivalent circuit of the GEC RF Reference Cell is determined by the use of a vector impedance meter and reported here. The measurement procedure and data reduction techniques are discussed and typical data are presented from which the component values are determined. Once the circuit is established, one can use it to define the ABCD parameters of the Cell which relate the terminal measurements to those at the plasma. A significant and as yet unresolved question is emphasized: namely, (open quotes)what is the path for the rf current.(close quotes) An experimental procedure for answering this question is suggested, but there does not appear to be a simple (open quotes)plasma(close quotes) reason for the answer. To obtain such an answer is a challenge to the experimenters and modelers. While the emphasis is on the GEC RF Reference Cell, the procedure, data reduction techniques, and (open quotes)the question(close quotes) are pertinent to all reactors.