TCMO(TM): A Versatile MEMS Oscillator Timing Platform

摘要

This paper demonstrates the first MEMS oscillator with a performance comparable to a temperature-compensated crystal oscillator (TCXO) in frequency accuracy, temperature stability, and phase noise. The presented temperature- compensated MEMS oscillator (TCMO Trade Mark) achieves -116 dBc/Hz phase noise at 1 kHz offset from the 123.9 MHz carrier, relating to a phase noise value of - 135.6 dBc/Hz at 1 kHz offset at 13 MHz. The temperature drift of the MEMS oscillator is within plus or minus 2.5 ppm over the entire operating temperature range from -40 degrees C to +85 degrees C. The TCMO TM uses a unique circuit architecture for an analog temperature compensation so that the output frequency does not suffer from frequency or phase discontinuities.