In Situ Metrology for the Corrective Polishing of Replicating Mandrels

摘要

The International X-ray Observatory (IXO) will require mandrel metrology with extremely tight tolerances on mirrors with up to 1.6 meter radii. Metrology on these shapes using conventional interferometry is difficult. A system that could perform in-situ metrology on the polishers may be ideal. Error budgets for the IXO mirror segments are presented. A potential solution is presented that uses a voice-coil controlled gauging head, air bearings, novel probes, and temperature control.