Femtosecond Laser Microstructuring and Chalcogen Inclusion in Silicon

摘要

This report focuses on the research of femtosecond laser microstructuring and chalcogen inclusion in silicon. Doping silicon with sulfur, selenium and tellurium (chalcogens), is studied for its potential impact on improving silicon based infrared photodetectors, light emitting diodes and thin- film photovoltaics. Furthermore, hydrophobic surface properties of laser microstructured silicon are demonstrated.