A Feasibility Survey of Some Analytical Techniques for Measuring Fluorine Atom Concentration in Lasers.

摘要

The results of a literature survey of several analytical techniques and their applicability toward measuring fluorine atom concentrations in laser systems are reported. These techniques include:electron paramagnetic resonance,absorption spectroscopy,mass spectrometry-molecular beam,electron beam fluorescence,Raman scattering,and photoelectron spectroscopy. (Author)