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Effect of Lapping Parameters on Generation of Damage on Silicon Nitride Ball Surfaces.

机译:研磨参数对氮化硅球表面损伤产生的影响。

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This is the final report on the effect of lapping parameters on generation of damage on silicon nitride ball surfaces. Two rough lapping experiments were conducted using 44 micrometers SiC and 15 micrometers diamond abrasives in free and controlled quantities and with various unit ball loads. The results indicate that, under the test conditions chosen, diamond generates a more uniform finer surface finish compared to the SiC and provides a larger increase in material removal rate with increase in unit ball load. (Author)

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